Quartz Chamber Vacuum Plasma Cleaner for Wafer Surface Cleaning

Quartz Chamber Vacuum Plasma Cleaner for Wafer Surface Cleaning

quartz chamber vacuum plasma cleaner for wafer area cleansing

Merchandise description:
10L plasma cleaner is a compact, non-damaging cleansing unit. The plasma cleaner makes use of low air strain to excite plasma as a cleaning medium, thus successfully staying away from CZPTary pollution caused by the liquid cleaning medium to the object to be cleaned. The system is geared up with a mechanical vacuum pump, whilst vacuuming maintains the vacuum of the chamber, the pollutants soon after the plasma reaction can also be pumped away by the vacuum pump therefore, the brief-time cleansing can totally clear the natural pollutants.

In addition to the cleansing perform, this little plasma cleaner can alter the area qualities of some materials in accordance to the requirements underneath specified problems. Throughout the cleaning approach, the glow discharge of the tiny plasma cleaner not only enhances the adhesion, compatibility and wettability of these components, but also disinfects and sterilizes the materials.

Modest plasma cleaners are commonly used in the fields of optics, optoelectronics, electronics, supplies science, daily life sciences, polymer science, biomedicine, and microfluidics.

CZPT parameters:

Main parts Product Parameters
Cleaning the chamber Chamber substance High purity quartz
  Chamber size Diameter 200 mm Duration 340 mm
RF electrical power provide Electrical power offer attributes The energy provide is an all-solid-condition RF electrical power source, and adopts a high-security and substantial-reliability power amplifier module and a DC module, which efficiently assures the RF power output of the energy provide. Higher top quality digital elements are used to make certain the dependability of the merchandise.
  Energy advantage Prolonged time typical procedure
Straightforward and versatile operation
Large power supply efficiency and lower heat generation
With best reflection power protection operate
  RF electrical power ~300W constantly adjustable
  Signal frequency thirteen.56MHz ±0.005%
  Mirrored power ≤100W
  Electricity balance ±0.one%
  RF connector N type connector
  CZPT effectiveness ≥75%
  Harmonic component ≤-fifty dBc
  cooling strategy Pressured air cooling
Fuel measurement Measuring unit Float flowmeter
  Fuel channel Two channels
  A channel variety 10~100ml
  B channel selection 16~160ml
Vacuum Vacuum measurement Digital vacuum gauge (resistance gauge)
  Vacuum pump Two-phase rotary vane vacuum pump
  Motor pace 50 Hz: 1440 sixty Hz: 1720
  Pumping fee 50 Hz: one.1L/s 60 Hz: one.3L/s
  Vacuum assortment .1Pa~10000Pa
  Ultimate vacuum .5Pa
  Motor sound ≤56dB
  Pipe interface Gasoline inlet: KF16 exhaust port KF16.
  Connecting pipe KF16 vacuum bellows
  Vacuum valve Solenoid valve
  Motor Electricity 400W
Other individuals Energy offer AC220V fifty/60Hz
  Complete energy 800W
  Operating temperature -10ºC- 40ºC
  Functioning vacuum ≤40Pa
  Total dimensions 600mm×650mm×560mm
  Overall Weight 80kg (which includes packaging)

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Q. Are you a manufacturer or a buying and selling organization?

A. We are expert laboratory instrument makers, have their personal design and style staff and manufacturing unit, have experienced technological experience, and can ensure the high quality of items and the best price.

Q. How is your firm’s merchandise following-revenue services technique?

A. The item guarantee period is 12 months, we can provide lifetime servicing. We have professional pre-income and after-sales departments that can react to you in 24 hrs to resolve any complex issues.

Q. How extended is your shipping time? If I want to personalize the instrument, how prolonged does it just take?

A.one. If the goods are in inventory, it is 5-ten times. two. We can supply CZPT solutions for our buyers. It normally takes 30-60 times relying on the technical specs of the custom made instrument.

Q. Our country’s electricity source and plug are various. How do you remedy it?

A. We can offer a transformer and plug in accordance to your regional needs in accordance to the electrical power plug of various countries.

Q. How to pay out?

A.T / T, L / C, D / P, and many others., it is advised to use Alibaba CZPT Guarantee.

Q. How is the package deal of goods? Delivery strategies?

A.1. Regular export fumigation signal picket box packaging 2. Specific, air, sea shipping according to buyer demands, discover the most ideal way.

 A lot more questions, make sure you contact buyer support


Quartz Chamber Vacuum Plasma Cleaner for Wafer Surface Cleaning