Product Description
Product Description
EM4/EM8
Ultimate pressure:≤ 2 and ≤ 20 mbar
Pumping speed:4÷10 m3/h
The EM 4 and EM 8 are single-stage rotary vane lubricated pumps with oil recirculation. The rotor is keyed directly CHINAMFG the motor shaft.
The EM 4 and EM 8 are single-stage rotary vane lubricated pumps with oil recirculation.
The rotor is keyed directly CHINAMFG the motor shaft.
The oil tank is provided with a system for separating the oil mists from the exhaust air.
The gas ballast, except for EM4, prevents condensation inside the pump when small quantities of steam are sucked.
The EM 4 and EM 8 pumps are suitable for the evacuation of closed systems or to operate at a constant vacuum included in the following range:
EM 4 – EM 8 from 2 to 300 mbar (absolute)
EM 4 B – EM 8 B from 20 to 850 mbar (absolute)
ACCESSORIES
The following accessories are useful for the installation and for the control of the pump operation parameters:
-
External suction filter
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Vacuum gauges
Main specifications
|
EM4 |
EM8 |
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|
Pumping speed |
m³/h |
50Hz |
4 |
8,5 |
|
|
60Hz |
4,8 |
10 |
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|
Ultimate pressure with gas ballast (abs.) |
mbar |
≤ 2 (≤ 20 /B) |
≤ 2 (≤ 20 /B) |
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|
Motor power |
kW |
50Hz |
0,12 |
0,25 |
|
|
60Hz |
0,15 |
0,30 |
|||
|
Motor speed |
rpm |
50Hz |
3000 |
3000 |
|
|
60Hz |
3600 |
3600 |
|||
|
Water vapour tolerance |
mbar |
/ |
20 |
||
|
Water vapour pumping capacity |
kg/h |
/ |
0,125 |
||
|
Lubricant charge |
l |
0,1 |
0,15 |
||
|
Sound pressure level |
dB(A) |
50Hz |
57 |
58 |
|
|
60Hz |
59 |
60 |
|||
|
Dimensions |
L x B x H |
mm |
236x129x139 |
300x166x139 |
|
|
Weight |
kg |
5,4 |
11,7 |
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|
Connections* |
Inlet |
1/8″ Gas |
3/8″ Gas |
||
* Other types of connection available CHINAMFG request
| After-sales Service: | 12 Months From Date of Start-up or 15 Months From |
|---|---|
| Warranty: | 12 Months From Date of Start-up or 15 Months From |
| Oil or Not: | Oil |
| Structure: | Rotary Vacuum Pump |
| Exhauster Method: | Entrapment Vacuum Pump |
| Vacuum Degree: | Vacuum |
| Customization: |
Available
|
|
|---|
What Is the Role of Vacuum Pumps in Semiconductor Manufacturing?
Vacuum pumps play a critical role in semiconductor manufacturing processes. Here’s a detailed explanation:
Semiconductor manufacturing involves the production of integrated circuits (ICs) and other semiconductor devices used in various electronic applications. Vacuum pumps are used extensively throughout the semiconductor manufacturing process to create and maintain the required vacuum conditions for specific manufacturing steps.
Here are some key roles of vacuum pumps in semiconductor manufacturing:
1. Deposition Processes: Vacuum pumps are used in deposition processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD). These processes involve depositing thin films of materials onto semiconductor wafers to create various layers and patterns. Vacuum pumps help create a low-pressure environment necessary for precise control of the deposition process, ensuring uniform and high-quality film formation.
2. Etching and Cleaning: Vacuum pumps are utilized in etching and cleaning processes, which involve the removal of specific layers or contaminants from semiconductor wafers. Dry etching techniques, such as plasma etching and reactive ion etching, require a vacuum environment to facilitate the ionization and removal of material. Vacuum pumps aid in creating the necessary low-pressure conditions for efficient etching and cleaning processes.
3. Ion Implantation: Ion implantation is a process used to introduce impurities into specific regions of a semiconductor wafer to modify its electrical properties. Vacuum pumps are used to evacuate the ion implantation chamber, creating the required vacuum environment for accurate and controlled ion beam acceleration and implantation.
4. Wafer Handling and Transfer: Vacuum pumps are employed in wafer handling and transfer systems. These systems utilize vacuum suction to securely hold and manipulate semiconductor wafers during various manufacturing steps, such as loading and unloading from process chambers, robotic transfer between tools, and wafer alignment.
5. Load Lock Systems: Load lock systems are used to transfer semiconductor wafers between atmospheric conditions and the vacuum environment of process chambers. Vacuum pumps are integral components of load lock systems, creating and maintaining the vacuum conditions necessary for wafer transfer while minimizing contamination risks.
6. Metrology and Inspection: Vacuum pumps are utilized in metrology and inspection tools used for characterizing semiconductor devices. These tools, such as scanning electron microscopes (SEMs) and focused ion beam (FIB) systems, often operate in a vacuum environment to enable high-resolution imaging and accurate analysis of semiconductor structures and defects.
7. Leak Detection: Vacuum pumps are employed in leak detection systems to identify and locate leaks in vacuum chambers, process lines, and other components. These systems rely on vacuum pumps to evacuate the system and then monitor for any pressure rise, indicating the presence of leaks.
8. Cleanroom Environment Control: Semiconductor manufacturing facilities maintain cleanroom environments to prevent contamination during the fabrication process. Vacuum pumps are used in the design and operation of the cleanroom ventilation and filtration systems, helping to maintain the required air cleanliness levels by removing particulates and maintaining controlled air pressure differentials.
Vacuum pumps used in semiconductor manufacturing processes are often specialized to meet the stringent requirements of the industry. They need to provide high vacuum levels, precise control, low contamination levels, and reliability for continuous operation.
Overall, vacuum pumps are indispensable in semiconductor manufacturing, enabling the creation of the necessary vacuum conditions for various processes, ensuring the production of high-quality semiconductor devices.
Considerations for Selecting a Vacuum Pump for Cleanroom Applications
When it comes to selecting a vacuum pump for cleanroom applications, several considerations should be taken into account. Here’s a detailed explanation:
Cleanrooms are controlled environments used in industries such as semiconductor manufacturing, pharmaceuticals, biotechnology, and microelectronics. These environments require strict adherence to cleanliness and particle control standards to prevent contamination of sensitive processes or products. Selecting the right vacuum pump for cleanroom applications is crucial to maintain the required level of cleanliness and minimize the introduction of contaminants. Here are some key considerations:
1. Cleanliness: The cleanliness of the vacuum pump is of utmost importance in cleanroom applications. The pump should be designed and constructed to minimize the generation and release of particles, oil vapors, or other contaminants into the cleanroom environment. Oil-free or dry vacuum pumps are commonly preferred in cleanroom applications as they eliminate the risk of oil contamination. Additionally, pumps with smooth surfaces and minimal crevices are easier to clean and maintain, reducing the potential for particle buildup.
2. Outgassing: Outgassing refers to the release of gases or vapors from the surfaces of materials, including the vacuum pump itself. In cleanroom applications, it is crucial to select a vacuum pump with low outgassing characteristics to prevent the introduction of contaminants into the environment. Vacuum pumps specifically designed for cleanroom use often undergo special treatments or use materials with low outgassing properties to minimize this effect.
3. Particle Generation: Vacuum pumps can generate particles due to the friction and wear of moving parts, such as rotors or vanes. These particles can become a source of contamination in cleanrooms. When selecting a vacuum pump for cleanroom applications, it is essential to consider the pump’s particle generation level and choose pumps that have been designed and tested to minimize particle emissions. Pumps with features like self-lubricating materials or advanced sealing mechanisms can help reduce particle generation.
4. Filtration and Exhaust Systems: The filtration and exhaust systems associated with the vacuum pump are critical for maintaining cleanroom standards. The vacuum pump should be equipped with efficient filters that can capture and remove any particles or contaminants generated during operation. High-quality filters, such as HEPA (High-Efficiency Particulate Air) filters, can effectively trap even the smallest particles. The exhaust system should be properly designed to ensure that filtered air is released outside the cleanroom or passes through additional filtration before being reintroduced into the environment.
5. Noise and Vibrations: Noise and vibrations generated by vacuum pumps can have an impact on cleanroom operations. Excessive noise can affect the working environment and compromise communication, while vibrations can potentially disrupt sensitive processes or equipment. It is advisable to choose vacuum pumps specifically designed for quiet operation and that incorporate measures to minimize vibrations. Pumps with noise-dampening features and vibration isolation systems can help maintain a quiet and stable cleanroom environment.
6. Compliance with Standards: Cleanroom applications often have specific industry standards or regulations that must be followed. When selecting a vacuum pump, it is important to ensure that it complies with relevant cleanroom standards and requirements. Considerations may include ISO cleanliness standards, cleanroom classification levels, and industry-specific guidelines for particle count, outgassing levels, or allowable noise levels. Manufacturers that provide documentation and certifications related to cleanroom suitability can help demonstrate compliance.
7. Maintenance and Serviceability: Proper maintenance and regular servicing of vacuum pumps are essential for their reliable and efficient operation. When choosing a vacuum pump for cleanroom applications, consider factors such as ease of maintenance, availability of spare parts, and access to service and support from the manufacturer. Pumps with user-friendly maintenance features, clear service instructions, and a responsive customer support network can help minimize downtime and ensure continued cleanroom performance.
In summary, selecting a vacuum pump for cleanroom applications requires careful consideration of factors such as cleanliness, outgassing characteristics, particle generation, filtration and exhaust systems, noise and vibrations, compliance with standards, and maintenance requirements. By choosing vacuum pumps designed specifically for cleanroom use and considering these key factors, cleanroom operators can maintain the required level of cleanliness and minimize the risk of contamination in their critical processes and products.
Are There Different Types of Vacuum Pumps Available?
Yes, there are various types of vacuum pumps available, each designed to suit specific applications and operating principles. Here’s a detailed explanation:
Vacuum pumps are classified based on their operating principles, mechanisms, and the type of vacuum they can generate. Some common types of vacuum pumps include:
1. Rotary Vane Vacuum Pumps:
– Description: Rotary vane pumps are positive displacement pumps that use rotating vanes to create a vacuum. The vanes slide in and out of slots in the pump rotor, trapping and compressing gas to create suction and generate a vacuum.
– Applications: Rotary vane vacuum pumps are widely used in applications requiring moderate vacuum levels, such as laboratory vacuum systems, packaging, refrigeration, and air conditioning.
2. Diaphragm Vacuum Pumps:
– Description: Diaphragm pumps use a flexible diaphragm that moves up and down to create a vacuum. The diaphragm separates the vacuum chamber from the driving mechanism, preventing contamination and oil-free operation.
– Applications: Diaphragm vacuum pumps are commonly used in laboratories, medical equipment, analysis instruments, and applications where oil-free or chemical-resistant vacuum is required.
3. Scroll Vacuum Pumps:
– Description: Scroll pumps have two spiral-shaped scrolls—one fixed and one orbiting—which create a series of moving crescent-shaped gas pockets. As the scrolls move, gas is continuously trapped and compressed, resulting in a vacuum.
– Applications: Scroll vacuum pumps are suitable for applications requiring a clean and dry vacuum, such as analytical instruments, vacuum drying, and vacuum coating.
4. Piston Vacuum Pumps:
– Description: Piston pumps use reciprocating pistons to create a vacuum by compressing gas and then releasing it through valves. They can achieve high vacuum levels but may require lubrication.
– Applications: Piston vacuum pumps are used in applications requiring high vacuum levels, such as vacuum furnaces, freeze drying, and semiconductor manufacturing.
5. Turbo Molecular Vacuum Pumps:
– Description: Turbo pumps use high-speed rotating blades or impellers to create a molecular flow, continuously pumping gas molecules out of the system. They typically require a backing pump to operate.
– Applications: Turbo molecular pumps are used in high vacuum applications, such as semiconductor fabrication, research laboratories, and mass spectrometry.
6. Diffusion Vacuum Pumps:
– Description: Diffusion pumps rely on the diffusion of gas molecules and their subsequent removal by a high-speed jet of vapor. They operate at high vacuum levels and require a backing pump.
– Applications: Diffusion pumps are commonly used in applications requiring high vacuum levels, such as vacuum metallurgy, space simulation chambers, and particle accelerators.
7. Cryogenic Vacuum Pumps:
– Description: Cryogenic pumps use extremely low temperatures to condense and capture gas molecules, creating a vacuum. They rely on cryogenic fluids, such as liquid nitrogen or helium, for operation.
– Applications: Cryogenic vacuum pumps are used in ultra-high vacuum applications, such as particle physics research, material science, and fusion reactors.
These are just a few examples of the different types of vacuum pumps available. Each type has its advantages, limitations, and suitability for specific applications. The choice of vacuum pump depends on factors like required vacuum level, gas compatibility, reliability, cost, and the specific needs of the application.
editor by CX 2023-11-08
